| 发明名称 |
METHOD FOR PRODUCING POLYMER |
| 摘要 |
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer. |
| 申请公布号 |
US2017097567(A1) |
申请公布日期 |
2017.04.06 |
| 申请号 |
US201615383797 |
申请日期 |
2016.12.19 |
| 申请人 |
Shin-Etsu Chemical Co., Ltd. |
发明人 |
Hatakeyama Jun;Adachi Teppei;Funatsu Kenji |
| 分类号 |
G03F7/039;G03F7/004;G03F7/16;G03F7/32;C08F220/18;G03F7/20;G03F7/38;C08F220/28;G03F7/11 |
主分类号 |
G03F7/039 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for producing a polymer comprising recurring units having an acid generator bound to the backbone, comprising
polymerizing monomers corresponding to the recurring units in a solution of a non-polymerizable compound containing at least one nitrogen atom to which at least one acid labile group is bound. |
| 地址 |
Tokyo JP |
