发明名称 SCRS with Checker Board Layouts
摘要 An Electro-Static Discharge (ESD) protection circuit includes a plurality of groups of p-type heavily doped semiconductor strips (p+ strips) and a plurality of groups of n-type heavily doped semiconductor strips (n+ strips) forming an array having a plurality of rows and columns. In each of the rows and the columns, the plurality of groups of p+ strips and the plurality of groups of n+ strips are allocated in an alternating layout. The ESD protection circuit further includes a plurality of gate stacks, each including a first edge aligned to an edge of a group in the plurality of groups of p+ strips, and a second edge aligned to an edge of a group in the plurality of groups of n+ strips.
申请公布号 US2017098645(A1) 申请公布日期 2017.04.06
申请号 US201615171812 申请日期 2016.06.02
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Su Yu-Ti;Yang Han-Jen;Lin Wun-Jie;Chu Li-Wei
分类号 H01L27/02;H01L29/06;H01L29/10 主分类号 H01L27/02
代理机构 代理人
主权项 1. An Electro-Static Discharge (ESD) protection device comprising: a first branch electrically coupled between a first node and a second node, the first branch comprising: a first plurality of well regions of a second conductivity type in a substrate of a first conductivity type, the second conductivity type being opposite the first conductivity type, the first plurality of well regions being arranged in a first plurality of rows, the first plurality of well regions being physically separated from each other; anda first plurality of diodes on the first plurality of well regions, the first plurality of diodes being arranged in the first plurality of rows and a first plurality of columns, a first subset of the first plurality of diodes being electrically coupled between the first node and the second node in a forward direction, a second subset of the first plurality of diodes being electrically decoupled between the first node and the second node, each diode of the first plurality of diodes comprising: a first semiconductor strip having the first conductivity type; anda second semiconductor strip having the second conductivity type, wherein a first diode of adjacent diodes in each column of the first plurality of columns has a corresponding first semiconductor strip aligned with a corresponding second semiconductor strip of a second diode of the adjacent diodes along a first direction, wherein the first diode of adjacent diodes in each column of the first plurality of columns has a corresponding second semiconductor strip aligned with a corresponding first semiconductor strip of the second diode of the adjacent diodes along a second direction parallel to the first direction, and wherein a number of diodes electrically coupled between the first node and the second node in at least one column of the first plurality of columns is less than a number of the first plurality of rows.
地址 Hsin-Chu TW