Substrate Holder Having Integrated Temperature Measurement Electrical Devices

摘要

A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.

主权项

1. A substrate holder, comprising:
a base plate; a bond layer disposed over the base plate; a ceramic layer disposed over the bond layer, the ceramic layer having a top surface including an area configured to support a substrate; a number of temperature measurement electrical devices attached to the ceramic layer, each of the number of temperature measurement electrical devices configured for measuring a corresponding local temperature of the ceramic layer, each of the number of temperature measurement electrical devices having a plurality of electrical contacts; a plurality of electrically conductive traces embedded within the ceramic layer, some of the plurality of electrically conductive traces positioned in electrical contact with one or more of the plurality of electrical contacts of the number of temperature measurement electrical devices; and a plurality of electrical wires in electrical contact with one or more of the plurality of electrically conductive traces, the plurality of electrical wires extending from the ceramic layer through the bond layer and through the base plate to a control circuit.