发明名称 ULTRASONIC TRANSDUCER ELEMENT CHIP, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE
摘要 An ultrasonic transducer element chip includes a substrate defining an opening, an ultrasonic transducer element disposed at a position corresponding to the opening in a thickness direction of the substrate, and a reinforcing member connected to the substrate to cover the opening. The reinforcing member defines a ventilation passage from the opening to an outside of the substrate.
申请公布号 US2017095838(A1) 申请公布日期 2017.04.06
申请号 US201615383684 申请日期 2016.12.19
申请人 SEIKO EPSON CORPORATION 发明人 NAKAMURA Tomoaki;TSURUNO Jiro;KIYOSE Kanechika
分类号 B06B1/06;G01S15/89;H01L41/22;H01L41/08;A61B8/00;A61B8/08 主分类号 B06B1/06
代理机构 代理人
主权项 1. An ultrasonic transducer element chip comprising: a substrate defining an opening; an ultrasonic transducer element disposed at a position corresponding to the opening in a thickness direction of the substrate; and a reinforcing member connected to the substrate to cover the opening, the reinforcing member defining a ventilation passage from the opening to an outside of the substrate.
地址 Tokyo JP