IMPEDANCE TUNERS WITH POSITION FEEDBACK

摘要

An impedance tuner includes a controller, an RF transmission line, and a movable capacitive object configured for movement commanded by the controller relative to the transmission line to alter impedance. A position sensor is configured to provide feedback position data to the controller indicative of the actual position of the capacitive object after it is moved. The controller is configured to utilize the feedback position data in a closed loop to position the capacitive object at a desired position within a tolerance.