Method of surface tension control to reduce trapped gas bubbles

摘要

The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.

主权项

1. A method comprising:
forming a surface on a patterned imprint template with a first surface energy, wherein the patterned imprint template comprises patterned recesses to form a pattern in a resist; and forming a surface on a substrate with a second surface energy, wherein the first surface energy is lower in comparison to the second surface energy and avoids trapping gas in the resist by pushing gas toward the imprint template for venting through the patterned recesses.