Connector for process chamber electrostatic elements

摘要

Provided herein are approaches for securing electrostatic elements within a lens component. In one approach, a connector includes a flexible coupling secured at a first end to an electrostatic element of a plurality of electrostatic elements, the plurality of electrostatic elements extending between a set of sidewalls of the lens component. The connector further includes a stub protruding from a feedthrough component provided through the set of sidewalls, the stub secured to the flexible coupling at a second end of the flexible coupling.

主权项

1. A lens component of an ion implantation system, the lens component comprising:
a conductive beam optic extending between a set of sidewalls; a feedthrough component provided through openings in the set of sidewalls; and a connector securing the feedthrough component to the conductive beam optic, the connector including a flexible coupling connected at a first end to the conductive beam optic and at a second end to a stub protruding from the feedthrough component.