Sputtering system and method including an arc detection

摘要

A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.

主权项

1. A plasma system comprising:
a direct current (DC) power supply for supplying electrical power to an anode and a cathode of a plasma chamber wherein the cathode serves as a target material, the electrical power being sufficient to generate a plasma within said plasma chamber; and a detection module configured to detect an occurrence of an arc in the plasma chamber by monitoring at least one of impedance and conductance of said plasma, the detection module is further configured to receive a sensed voltage signal from a voltage sensor circuit or a sensed current signal from a current sensor circuit, one of the voltage sensor circuit or current sensor circuit connected to communicate the respective sensed voltage signal or sensed current signal to a multiplier, the multiplier configured to communicate a trip signal to a comparator; wherein the detection module is further configured to compare by the comparator one of the sensed voltage signal or the sensed current signal to said trip signal, such that
when the sensed voltage signal is compared by the comparator to said trip signal, said trip signal varying in accordance with the sensed current signal, said trip signal is obtained by the multiplier multiplying said sensed current signal by a pre-selected resistance value, wherein a trip indicator signal is generated indicating arcing is occurring if the sensed voltage signal crosses a threshold determined in accordance with the trip signal; orwhen said sensed current signal is compared by the comparator to said trip signal, said trip signal varying in accordance with the sensed voltage signal, said trip signal is obtained by the multiplier multiplying said sensed voltage signal by a pre-selected conductance value wherein the trip indicator signal is generated indicating arcing is occurring if the sensed current signal crosses a threshold determined in accordance the trip signal.