发明名称 Semiconductor device
摘要 A semiconductor device includes a semiconductor substrate including a plurality of active areas, a bit line crossing the plurality of active areas, a direct contact connecting a first active area of the plurality of active areas with the bit line, an insulating spacer covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate, a contact pad connected with a side wall of a second active area of the plurality of active areas, which neighbors the first active area, a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad, and a buried contact connected with the contact pad and filling the contact hole.
申请公布号 US9613966(B2) 申请公布日期 2017.04.04
申请号 US201514697782 申请日期 2015.04.28
申请人 Samsung Electronics Co., Ltd. 发明人 Kim Dae-ik;Kim Hyoung-sub;Kim Sung-eui
分类号 H01L27/108 主分类号 H01L27/108
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A semiconductor device comprising: a semiconductor substrate having a plurality of active areas; a bit line crossing the plurality of active areas; a direct contact connecting a first active area of the plurality of active areas with the bit line; an insulating spacer substantially covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate; a contact pad connected with a side wall of a second active area of the plurality of active areas, the contact pad being next to the first active area; a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad; and a buried contact connected to the contact pad and filling the contact hole.
地址 Gyeonggi-do KR