发明名称 |
Semiconductor device |
摘要 |
A semiconductor device includes a semiconductor substrate including a plurality of active areas, a bit line crossing the plurality of active areas, a direct contact connecting a first active area of the plurality of active areas with the bit line, an insulating spacer covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate, a contact pad connected with a side wall of a second active area of the plurality of active areas, which neighbors the first active area, a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad, and a buried contact connected with the contact pad and filling the contact hole. |
申请公布号 |
US9613966(B2) |
申请公布日期 |
2017.04.04 |
申请号 |
US201514697782 |
申请日期 |
2015.04.28 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Kim Dae-ik;Kim Hyoung-sub;Kim Sung-eui |
分类号 |
H01L27/108 |
主分类号 |
H01L27/108 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A semiconductor device comprising:
a semiconductor substrate having a plurality of active areas; a bit line crossing the plurality of active areas; a direct contact connecting a first active area of the plurality of active areas with the bit line; an insulating spacer substantially covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate; a contact pad connected with a side wall of a second active area of the plurality of active areas, the contact pad being next to the first active area; a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad; and a buried contact connected to the contact pad and filling the contact hole. |
地址 |
Gyeonggi-do KR |