Resonant optical device with a microheater

摘要

A resonant photonic device is provided. The device comprises an optical waveguiding element, such as an optical resonator, that includes a diode junction region, two signal terminals configured to apply a bias voltage across the junction region, and a heater laterally separated from the optical waveguiding element. A semiconductor electrical barrier element is juxtaposed to the heater. A metallic strip is electrically and thermally connected at one end to a signal terminal of the optical waveguiding element and thermally connected at another end to the barrier element.

主权项

1. A photonic device, comprising:
an optical waveguiding element comprising a diode junction region and two signal terminals configured to apply a bias voltage across the junction region; at least one heater laterally separated from the optical waveguiding element; an electrically discontinuous, thermally conductive path between the heater and the optical waveguiding element; and a dielectric layer that overlies the optical waveguiding element and the heater, wherein the thermally conductive path comprises a metallic film that overlies the dielectric layer and is thermally connected to the optical waveguiding element and to the heater by vertical metal connective elements.