发明名称 Method for forming thin film and method for fabricating organic light-emitting diode (OLED) display using the same
摘要 A method for forming a thin film for fabricating an organic light-emitting diode (OLED) display is disclosed. In one aspect, the method includes forming a plurality of shadow masks on a substrate. The substrate is then bent to form a predetermined curvature in the substrate. A deposition source is placed at a position having an equal angle with respect to central and peripheral portions of the substrate. The method also includes depositing a deposition material from the deposition source on the substrate and the shadow masks to form a thin film.
申请公布号 US9614192(B2) 申请公布日期 2017.04.04
申请号 US201414487946 申请日期 2014.09.16
申请人 Samsung Display Co., Ltd. 发明人 Kaplan Leonid;Prushinskiy Valeriy;Lee Won-Baek;Park Ji-Ryun;Park Hee-Sang
分类号 H01L51/56;C23C14/22;H01L51/52;C23C14/04;H01L51/00;C23C14/24;H01L27/32 主分类号 H01L51/56
代理机构 Knobbe, Martens, Olson & Bear, LLP 代理人 Knobbe, Martens, Olson & Bear, LLP
主权项 1. A method for forming a thin film, the method comprising: forming shadow masks on a substrate; bending the substrate to have a predetermined curvature; placing a deposition source at a position having a substantially equal angle with respect to the shadow masks and central and peripheral portions of the substrate; and depositing a deposition material from the deposition source onto the substrate and the shadow masks so as to form a thin film.
地址 Gyeonggi-do KR