发明名称 |
Method for forming thin film and method for fabricating organic light-emitting diode (OLED) display using the same |
摘要 |
A method for forming a thin film for fabricating an organic light-emitting diode (OLED) display is disclosed. In one aspect, the method includes forming a plurality of shadow masks on a substrate. The substrate is then bent to form a predetermined curvature in the substrate. A deposition source is placed at a position having an equal angle with respect to central and peripheral portions of the substrate. The method also includes depositing a deposition material from the deposition source on the substrate and the shadow masks to form a thin film. |
申请公布号 |
US9614192(B2) |
申请公布日期 |
2017.04.04 |
申请号 |
US201414487946 |
申请日期 |
2014.09.16 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Kaplan Leonid;Prushinskiy Valeriy;Lee Won-Baek;Park Ji-Ryun;Park Hee-Sang |
分类号 |
H01L51/56;C23C14/22;H01L51/52;C23C14/04;H01L51/00;C23C14/24;H01L27/32 |
主分类号 |
H01L51/56 |
代理机构 |
Knobbe, Martens, Olson & Bear, LLP |
代理人 |
Knobbe, Martens, Olson & Bear, LLP |
主权项 |
1. A method for forming a thin film, the method comprising:
forming shadow masks on a substrate; bending the substrate to have a predetermined curvature; placing a deposition source at a position having a substantially equal angle with respect to the shadow masks and central and peripheral portions of the substrate; and depositing a deposition material from the deposition source onto the substrate and the shadow masks so as to form a thin film. |
地址 |
Gyeonggi-do KR |