发明名称 Interconnect Structures for Assembly of Multi-Layer Semiconductor Devices
摘要 A multi-layer semiconductor device includes a first semiconductor structure having first and second opposing surfaces, the second surface of the first semiconductor structure having at least a first semiconductor package pitch. The multi-layer semiconductor device also includes a second semiconductor structure having first and second opposing surfaces, the first surface of the second semiconductor structure having a second semiconductor package pitch. The multi-layer semiconductor device additionally includes a third semiconductor structure having first and second opposing surfaces, the first surface of the third semiconductor structure having a third semiconductor package pitch which is different from at least the second semiconductor package pitch. The second and third semiconductor structures are provided on a same package level of the multi-layer semiconductor device. A corresponding method for fabricating a multi-layer semiconductor device is also provided.
申请公布号 US2017092621(A1) 申请公布日期 2017.03.30
申请号 US201515312063 申请日期 2015.11.05
申请人 Massachusetts Institute of Technology 发明人 DAS Rabindra N.;GOUKER Mark A.;GOUKER Pascale;JOHNSON Leonard M.;JOHNSON Ryan C.
分类号 H01L25/065;H01L23/498 主分类号 H01L25/065
代理机构 代理人
主权项 1. (canceled)
地址 Cambridge MA US