MAGNETIC INERTIAL SENSOR ENERGY HARVESTING AND SCAVENGING METHODS, CIRCUITS AND SYSTEMS

摘要

A magnetic energy harvesting and scavenging circuit includes a first substrate having a first surface and a second surface. An energy harvesting and scavenging coil is formed proximate the first surface. An electromechanical systems device, which may be a MEMS device, includes a moveable mass that extends over the first surface of the first substrate and may be displaced relative to the substrate in three dimensions responsive to an external force applied to the moveable mass. The movable mass includes at least one permanent magnet that is magnetically coupled to the energy harvesting and scavenging coil. Energy harvesting and scavenging circuitry, which may be formed in the first substrate where the first substrate is a semiconductor chip, is electrically coupled to the energy harvesting and scavenging coil and generates electrical energy due to magnetic flux variation through the energy harvesting and scavenging coil responsive to movement of the moveable mass.

主权项

1. A magnetic energy harvesting and scavenging circuit, comprising:
a first substrate having a first surface and a second surface; at least one energy harvesting and scavenging coil formed proximate the first surface; an electromechanical systems device including a moveable mass extending over the first surface of the first substrate and configured to be displaced relative to the first substrate in three dimensions responsive to an external force applied to the moveable mass, and the movable mass including at least one permanent magnet that is magnetically coupled to the at least one energy harvesting and scavenging coil; and energy harvesting and scavenging circuitry electrically coupled to the at least one energy harvesting and scavenging coil, the energy harvesting and scavenging circuitry configured to generate electrical energy due to magnetic flux variation through the at least one energy harvesting and scavenging coil responsive to movement of the moveable mass.