发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit. |
申请公布号 |
US2017090231(A1) |
申请公布日期 |
2017.03.30 |
申请号 |
US201615372831 |
申请日期 |
2016.12.08 |
申请人 |
Semiconductor Energy Laboratory Co., Ltd. |
发明人 |
KATO Kiyoshi;SAITO Toshihiko |
分类号 |
G02F1/1333;G02F1/1343;H01L27/12;G06F3/044;G06F3/041;G02F1/1368;G02F1/1345 |
主分类号 |
G02F1/1333 |
代理机构 |
|
代理人 |
|
主权项 |
1. (canceled) |
地址 |
Atsugi-shi JP |