COATING PROCESS FOR LASER HEAT SINKS

摘要

In various embodiments, passivation layers are deposited on internal surfaces of cooling channels defined within heat sinks for electronic devices such as laser beam emitters, the passivation layers retarding or substantially preventing erosion and/or corrosion of the heat sinks.

主权项

1. A method of heat sink preparation, the method comprising:
providing a plurality of heat sinks each defining an aperture fluidly connected to one or more hollow cooling channels defined within the heat sink, each cooling channel having an internal surface; providing a bottom manifold having an internal passage fluidly connected to (i) a gas inlet, (ii) a gas outlet, and (iii) a plurality of openings; sealing a first surface of each heat sink against the bottom manifold such that the aperture of each heat sink is aligned with one of the openings; and flowing two or more gaseous precursors through the gas inlet, into each of the heat sinks, and out of the gas outlet to thereby form a coating on the internal surface of the one or more cooling channels of each heat sink.