摘要 |
In order to provide an X-ray microscope of a size that can be brought into a room, by shortening the path length of the X-ray microscope, an X-ray microscope fabricated according to the present invention includes, in order along an optical axis, at least one each of an X-ray source 1, a specimen holding unit 3, a concave Kirkpatrick-Baez (KB) mirror 4, a convex KB mirror 5 and a light receiving unit 8 in a position having an image-forming relationship with the position of the specimen holding unit 3. |