MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

摘要

A mounting table includes a cooling table, a power feed body, an electrostatic chuck, a first elastic member and a clamping member. The power feed body is connected to the cooling table to transmit a high frequency power. A base of the electrostatic chuck has conductivity. An attraction unit has an attraction electrode and a heater therein, and is fastened to the base by metal bonding. The first elastic member is provided between the cooling table and the base to allow the electrostatic chuck to be spaced apart from the cooling table. The first elastic member forms, along with the cooling table and the base, a heat transfer space into which a heat transfer gas is supplied. The clamping member is contacted with the cooling table and the base, and allows the base and the first elastic member to be interposed between the cooling table and the clamping member.

主权项

1. A mounting table, comprising:
a cooling table made of a metal and provided with a flow path for a coolant; a power feed body connected to the cooling table, made of aluminum or an aluminum alloy and configured to transmit a high frequency power from a high frequency power supply, an electrostatic chuck comprising a conductive base provided on the cooling table; and an attraction unit made of ceramics, having therein an attraction electrode and a heater, which is provided on the base and fastened to the base by metal bonding; a first elastic member having insulating property, which is provided between the cooling table and the base, and is configured to allow the electrostatic chuck to be spaced apart from the cooling table and configured to form, along with the cooling table and the base, a heat transfer space into which a heat transfer gas is supplied between the cooling table and the base; and a clamping member, made of a metal and in contact with the cooling table and the base, allowing the base and the first elastic member to be interposed between the cooling table and the clamping member.