| 发明名称 |
EVALUATION SYSTEMS OF BLOCK COPOLYMER PATTERNS |
| 摘要 |
An evaluation system of block copolymer patterns includes a supplier, a plurality of analyzers, and a homopolymer interference remover. The supplier provides a sample including a block copolymer and a homopolymer. The analyzers measure a molecular weight of the block copolymer in the sample, measure a preliminary block ratio, the preliminary block ratio corresponding to a total ratio in the sample of each block in the block copolymer, and selectively measure a ratio of the homopolymer in the sample. The homopolymer interference remover subtracts the ratio of the homopolymer from the preliminary block ratio. |
| 申请公布号 |
US2017089871(A1) |
申请公布日期 |
2017.03.30 |
| 申请号 |
US201615242748 |
申请日期 |
2016.08.22 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SUH Min-Soo;PARK Hyun-Young;PARK Jung-Dae;KIM Ki-Hyun;LIM Kwang-Shin |
| 分类号 |
G01N30/88;G01N5/04;G01N30/74;C08F297/02 |
主分类号 |
G01N30/88 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An evaluation system of block copolymer patterns, comprising:
a sample supplier to provide a sample including a block copolymer and a homopolymer; a molecular weight analyzer to measure a molecular weight of the block copolymer in the sample; a preliminary block ratio analyzer to measure a preliminary block ratio, the preliminary block ratio corresponding to a total ratio in the sample of each block in the block copolymer; a homopolymer analyzer to selectively measure a ratio of the homopolymer in the sample; and a homopolymer interference remover to subtract the ratio of the homopolymer from the preliminary block ratio. |
| 地址 |
Suwon-si KR |
