发明名称 OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE
摘要 There is provided an optical imaging arrangement comprising an optical element and a piezoelectric device. The optical element comprises an optical element body carrying an optical surface on a front side of the optical element body. The piezoelectric device comprises a first electrode and at least one piezoelectric element. The first electrode is configured to cooperate with the at least one piezoelectric element and at least one second electrode, when the at least one second electrode is located on a rear side of the optical element body and the at least one piezoelectric element is located between the first electrode and the at least one second electrode, the rear side of the optical element body being opposite to the front side of the optical element body. The first electrode is located on the front side of the optical element body, and the at least one piezoelectric element is formed by at least one piezoelectric section of the optical element body. Preferably, the at least one second electrode is located on an electrode carrier unit separate from the optical element body.
申请公布号 WO2017050926(A1) 申请公布日期 2017.03.30
申请号 WO2016EP72595 申请日期 2016.09.22
申请人 CARL ZEISS SMT GMBH 发明人 KWAN, Yim-Bun Patrick;LORENZ, Axel;WESSELINGH, Jasper
分类号 G02B26/08;G03F7/20 主分类号 G02B26/08
代理机构 代理人
主权项
地址