| 摘要 |
A metal mask cooling device comprises: a refrigerator (4), a power control unit (13), a power supply unit (14), and a magnetic plate (10). The refrigerator (4) is attached to a side surface of the substrate (3), and cools, by the substrate (3), the metal mask (11) attached to the other side surface of the substrate (3). The magnetic plate (10) is disposed on the refrigerator (4), so as to attach the refrigerator (4) and the metal mask (11) to the both side surfaces of the substrate (3) respectively. The power control unit (13) is connected with the refrigerator (4), so as to control the refrigeration temperature of the refrigerator (4). The power supply unit (14) is separately connected with the refrigerator (4) and the power control unit (13), so as to supply power to the refrigerator (4) and the power control unit (13). Also disclosed is a metal mask evaporation device. |
