发明名称 OPTICAL SYSTEM FOR FIELD MAPPING AND/OR PUPIL MAPPING
摘要 An optical system (10) for field mapping and/or pupil mapping comprises an optical axis (16; 46), an aperture plane (18; 38) and an image plane (20; 40). The optical system comprises a lens system (11; 37) having three lens groups (14a,b,c; 42a,b,c) each with at least one lens, which are arranged spaced apart from one another along the optical axis (16; 46) between the aperture plane (18; 38) and the image plane (20; 40), wherein the three lens groups (14a,b,c; 42a,b,c) comprise a first lens material and/or a second lens material that is different from first the lens material. The lens system (11; 37) is further designed as a Fourier optic (12; 36), which additionally comprises a further lens group (14d; 42d) arranged spaced apart from the three lens groups (14a,b,c; 42a,b,c) along the optical axis (16; 46) between the aperture plane (18; 38) and the image plane (20; 40), and having at least one lens, which comprises the first lens material and/or the second lens material, wherein two of the four lens groups (14a,c; 42b,d) of the Fourier optic (12; 36) are designed as a first and a second colour under-corrected lens group in relation to the longitudinal colour error of the field mapping and/or the pupil mapping, wherein two others of the four lens groups (14b,d; 42a,c) of the Fourier optic (12; 36) are designed as a first and a second colour over-corrected lens group, wherein the Fourier optic (12; 36) has an alternating sequence between each colour under-corrected and colour over-corrected lens group.
申请公布号 WO2017050531(A1) 申请公布日期 2017.03.30
申请号 WO2016EP70537 申请日期 2016.08.31
申请人 CARL ZEISS SMT GMBH 发明人 MUENZ, Holger
分类号 G02B27/00;G02B13/14;G03F7/20 主分类号 G02B27/00
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