发明名称 THIN FILM TRANSISTOR AND PREPARATION METHOD THEREFOR, AND ARRAY SUBSTRATE
摘要 Provided are a thin film transistor and a preparation method therefor, and an array substrate, belonging to the technical field of thin film transistors and capable of solving the problem of poor performance of existing thin film transistors. The method for preparing the thin film transistor comprises: S1, forming a gate electrode (11) constituted by graphene; S2, forming a gate insulating layer (12) constituted by graphene oxide; S3, forming an active region (13) constituted by doped graphene oxide or doped graphene; and S4, forming a source electrode (14) and a drain electrode (15) constituted by graphene. The graphene constituting the source electrode (14), the drain electrode (15) and the gate electrode (11) is formed by reducing graphene oxide, and the doped graphene oxide or the doped graphene constituting the active region (13) is formed by treating graphene oxide.
申请公布号 WO2017049887(A1) 申请公布日期 2017.03.30
申请号 WO2016CN77190 申请日期 2016.03.24
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 ZHANG, Dacheng;HOU, Dianjie;DONG, Wenchu
分类号 H01L21/336;H01L21/28;H01L21/34;H01L21/44;H01L27/12;H01L29/43;H01L29/49;H01L29/51;H01L29/786 主分类号 H01L21/336
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