MICRO OPERATING SYSTEM BASED ON SCANNING ELECTRON MICROSCOPE

摘要

Disclosed is a micro operating system (100) based on a scanning electron microscope, wherein the system is applied to a scanning electron microscope device. The micro operating system (100) based on a scanning electron microscope comprises a base (10); several three-axis linear motion platforms (20) and a five-axis macro-motion platform (30) arranged on the base (10); a sample operating platform (40) arranged on the five-axis macro-motion platform (30); and carbon nano manipulators (50) arranged corresponding to each of the three-axis linear motion platforms (20), wherein the carbon nano manipulators (50) are arranged on the three-axis linear motion platforms (20), and the several three-axis linear motion platforms (20) are arranged around the circumference of the sample operating platform (40) at the periphery of the sample operating platform (40). By means of the arrangement of the above-mentioned structure, the micro operating system (100) based on a scanning electron microscope achieves multi-axis linkage with respect to a sample, thereby solving the problem in the prior art that a sample can only be observed from a single aspect.