METHOD FOR DETECTING THE CENTER OF SUBSTRATE, METHOD FOR TRANSPORTING A SUBSTRATE, TRANSPORTING UNIT AND APPARATUS FOR TREATING A SUBSTRATE INCLUDING THE UNIT

摘要

A method for detecting a center of substrate, for transporting a substrate, a substrate transporting unit, and a substrate treating apparatus are provided. The substrate center detecting method includes detecting four edge positions of the substrate, judging whether a notch exists among the four edge positions or not, moving the substrate when there is a notch among the four edge positions, and calculating a center of the substrate, wherein the calculating includes re-detecting four edge positions of the substrate, calculating a first midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the detecting, calculating a second midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the re-detecting, and determining a real midpoint of the substrate based on moving status of the first and second midpoints of the substrate.

主权项

1. A method for detecting a center of a substrate comprising:
detecting four edge positions of a substrate; judging whether a notch exists among the detected four edge positions or not; moving the substrate when there is a notch among the detected four edge positions; and calculating a center of the substrate; wherein the calculating comprises:
re-detecting four edge positions of the substrate;calculating a first midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected;calculating a second midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the re-detecting; anddetermining a real midpoint of the substrate based on a moving status of the first midpoint of the substrate and the second midpoint of the substrate.