POLARIZATION MODULE AND LASER APPARATUS INCLUDING THE SAME

摘要

A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.

主权项

1. A polarization module comprising:
a first lens and a second lens that, together, reduce a first-directional length of a cross-section of an incident laser beam having an optical axis; a polarization beam splitter that divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other; a first prism lens and a second prism lens that produce an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis; and at least one half wave plate disposed between the polarization beam splitter and the first prism lens.