发明名称 3D PRINTED MAGNETRON HAVING ENHANCED COOLING CHARACTERISTICS
摘要 Embodiments of the present disclosure generally provide magnetron configurations that provide more efficient and/or more uniform cooling characteristics and methods for forming the magnetrons. The magnetron includes one or more flow directing structures disposed between parallel cooling fins. The flow directing structures direct air flow across various surfaces of the cooling fins and prevent that otherwise would be obstructed by magnetron components, reducing the incidence and/or magnitude of hot spots on the cooling fins and/or on other magnetron components. The flow directing structures also adjust flow rates to improve cooling efficiency.
申请公布号 WO2017053042(A1) 申请公布日期 2017.03.30
申请号 WO2016US49993 申请日期 2016.09.01
申请人 APPLIED MATERIALS, INC. 发明人 RAJ, Govinda;YAVELBERG, Simon;SANKARAKRISHNAN, Ramprakash
分类号 H01J23/10;H01J37/34 主分类号 H01J23/10
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