发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device (300) comprising: a doped semiconductor substrate (302); an epitaxial layer (304), disposed on top of the substrate, the epitaxial layer having a lower concentration of dopant than the substrate; a switching region disposed on top of the epitaxial layer; and a contact diffusion (350) disposed on top of the epitaxial layer, the contact diffusion having a higher concentration of dopant than the epitaxial layer; wherein the epitaxial layer forms a barrier between the contact diffusion and the substrate.
申请公布号 US2017092761(A1) 申请公布日期 2017.03.30
申请号 US201615253563 申请日期 2016.08.31
申请人 NXP B.V. 发明人 Habenicht Soenke;Holland Steffen
分类号 H01L29/78;H01L29/417;H01L29/739;H01L29/66 主分类号 H01L29/78
代理机构 代理人
主权项 1. A semiconductor device comprising: a doped semiconductor substrate; an epitaxial layer, disposed on top of the substrate, the epitaxial layer having a lower concentration of dopant than the substrate; a switching region disposed on top of the epitaxial layer; and a contact diffusion disposed on top of the epitaxial layer, the contact diffusion having a higher concentration of dopant than the epitaxial layer; wherein the epitaxial layer forms a barrier between the contact diffusion and the substrate.
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