| 摘要 |
There is provided a method for controlling a shape measuring apparatus which can achieve both trajectory correcting capability and control stability. A stylus tip is moved along a scanning path while controlling the stylus tip so as to keep an amount of deflection of a probe to a workpiece to be a reference amount of deflection. A movement instruction for the probe is generated according to a combined velocity vector V represented by the following expression: combined velocity vector V = Gf ‹ Vf + Ge ‹ Ve + Gc ‹ Vc 2 ,
where Vf is a path velocity vector to move the probe along the scanning path,
Ve is a deflection correcting vector to keep the amount of deflection of the probe to the workpiece to be the reference amount of deflection,
Vc2 is a second trajectory correcting vector represented by (Vc1.q)q,
Vc1 is a first trajectory correcting vector to correct a position of the probe so that the stylus tip heads to the scanning path, and
q is a trajectory correcting direction vector given by a vector product of a normal line of a surface of the workpiece and the path velocity vector Vf. |
