| 发明名称 |
COATING LIQUID FOR FORMING METAL OXIDE THIN FILM AND METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTOR |
| 摘要 |
A coating liquid for forming a metal oxide thin film includes: an inorganic indium compound; an inorganic calcium compound or an inorganic strontium compound, or both thereof; and an organic solvent. |
| 申请公布号 |
EP2786405(B1) |
申请公布日期 |
2017.03.29 |
| 申请号 |
EP20120852690 |
申请日期 |
2012.11.28 |
| 申请人 |
Ricoh Company, Ltd. |
发明人 |
NAKAMURA, Yuki;UEDA, Naoyuki;ABE, Yukiko;SONE, Yuji;MATSUMOTO, Shinji;TAKADA, Mikiko;SAOTOME, Ryoichi |
| 分类号 |
H01L21/368;H01L21/02;H01L21/336;H01L29/786 |
主分类号 |
H01L21/368 |
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