发明名称 |
METHOD AND SYSTEM FOR DETECTING AND CLASSIFYING DEFECTS OF SUBSTRATE |
摘要 |
A method and system for detecting and classifying a defect of a substrate, the system including a first channel, including a first illuminating unit to irradiate a light to a substrate and a first imaging unit to take images by sensing a light from the substrate when it is irradiated; a second channel, including a second illuminating unit to irradiate a light to the substrate and a second imaging unit to take images by sensing a light from the substrate when it is irradiated; an image constructing module to construct two images of the substrate using the images of the first and second imaging units respectively; and an image processing module to detect, when the substrate has a defect, that the defect is a defect on or in the substrate, based on a relationship of positions where the defect of the substrate appears in the two images of the substrate. |
申请公布号 |
EP2459989(A4) |
申请公布日期 |
2017.03.29 |
申请号 |
EP20100803821 |
申请日期 |
2010.02.26 |
申请人 |
Saint-Gobain Glass France |
发明人 |
SCHWEITZER, Jean-Philippe;LI, Huifen;LIN, Xiaofeng;GUO, Xiaofeng;GUO, Feng;SUN, Xiaowei |
分类号 |
G01N21/896 |
主分类号 |
G01N21/896 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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