COEFFICIENT-OF-THERMAL-EXPANSION MEASUREMENT

摘要

A measurement target (step gauge (10)) and a reference gauge (reference gauge block (2)) are placed in parallel in an inside of a temperature-controlled chamber (30). After an interior temperature of the temperature-controlled chamber (30) is set at a first temperature, a relative measurement of a length from a first surface (11) to a second surface (12) of the measurement target is performed with reference to a length from a first reference surface (2A) to a second reference surface (2B) of the reference gauge. Then, the interior temperature of the temperature-controlled chamber (30) is set at a second temperature and a relative measurement of the length from the first surface (11) to the second surface (12) is similarly performed with reference to the length from the first reference surface (2A) to the second reference surface (2B). A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.