Array substrate, display device and manufacturing method of array substrate

摘要

An array substrate, a display device and a method of producing the array substrate are provided, and the array substrate includes a substrate and a thin film field effect transistor and a data line formed on the substrate, and the thin film field effect transistor includes a gate electrode, an active layer, a source electrode and a drain electrode, a gate insulating layer is formed between the gate electrode and the active layer, and the array substrate includes: a protection layer formed between the gate insulating layer and the data line and being in direct contact with the data line; and the protection layer is provided on the same layer with and has the same material with the active layer.

主权项

1. An array substrate comprising a substrate and a thin film field effect transistor and a data line formed on the substrate, the thin film field effect transistor comprising a gate electrode, an active layer, a source electrode and a drain electrode, and a gate insulating layer being formed between the gate electrode and the active layer;
wherein the array substrate further comprises: a protection layer formed between the gate insulating layer and the data line and being in direct contact with the data line; and the protection layer is provided on the same layer with and has the same material as the active layer; and a barrier layer formed on the active layer and on the gate insulating layer outside the protection layer, wherein, the active layer is covered by the barrier layer, and the source electrode and the drain electrode are in physical contact with the active layer through via holes in the barrier layer.