发明名称 |
Photosensitive resin composition and application thereof |
摘要 |
A photosensitive resin composition includes an alkali-soluble resin (A), a compound having an unsaturated vinyl group (B), a photo initiator (C), solvent (D) and a silane compound (E) having a structure shown as formula (I):;in the formula (I), A individually and independently represents a single bond, an alkylene group, or an arylene group, B individually and independently represents an organic group having diphenyl phosphine, hydrogen atom, an alkyl group, an aryl group, or —OR, in which R is a C1-C6 alkyl group or a phenyl group, at least one B is the organic group having diphenyl phosphine and at least one B is —OR. When B is —OR, A connected to B is the single bond. A film formed by the photosensitive resin composition has good refractivity and adhesivity to molybdenum. |
申请公布号 |
US9606436(B2) |
申请公布日期 |
2017.03.28 |
申请号 |
US201615231771 |
申请日期 |
2016.08.08 |
申请人 |
CHI MEI CORPORATION |
发明人 |
Tsai Yu-Jie;Chen I-Kuang |
分类号 |
G03F7/029;G03F7/033;G03F7/075;G03F7/16;G03F7/20;G03F7/32;G03F7/40 |
主分类号 |
G03F7/029 |
代理机构 |
CKC & Partners Co., Ltd. |
代理人 |
CKC & Partners Co., Ltd. |
主权项 |
1. A photosensitive resin composition, comprising:
an alkali-soluble resin (A); a compound having a vinyl unsaturated group (B); a photoinitiator (C); a solvent (D); and a silane compound (E), wherein the silane compound (E) comprises a silane compound (E-1) having a structure of formula (I) in the formula (I), A individually and independently represents a single bond, an alkylene group or an arylene group, B individually and independently represents an organic group having a diphenyl phosphine group, a hydrogen atom, an alkyl group, an aryl group or —OR, wherein R is an alkyl group of 1 to 6 carbons or a phenyl group, wherein at least one B is the organic group having the diphenyl phosphine group, at least one B is —OR, and when the B is —OR, the A connected to the B is the single bond. |
地址 |
Tainan TW |