In line flow control components and systems

摘要

An in-line flow control component includes a body having an inlet and an outlet that are substantially coaxial with a tube extending through the body. The tube forms a flow path between the inlet and the outlet, and one end of the tube sealingly engages a valve seat for controlling fluid flow between the inlet and outlet. First and second diaphragms each have an opening sealingly secured about an outer periphery of the tube and an outer peripheral portion sealed to the body. The diaphragms selectively move the tube between open and closed positions in response to force acting on the diaphragms. The force is provided by either a mechanical mechanism (toggle, wedge member, threaded adjustment knob, etc.) or fluid pressure introduced between the diaphragms. The diaphragms may be similarly or differently dimensioned. Plural flow control components may be assembled in end-to-end sealed relationship.

主权项

1. An in-line flow control component used in a high purity fluid system comprising:
a metal body having an inlet and an outlet, the inlet and the outlet being substantially coaxial; a metal tube having first and second ends disposed in fixed relation to one another, the metal tube extending through at least a portion of the metal body and forming a flow path between the inlet and the outlet, one end of the metal tube sealingly engaging a metal valve seat for controlling fluid flow between the inlet and the outlet; a first metal diaphragm having an opening, an inner peripheral portion of the first metal diaphragm sealingly secured to an outer periphery of the metal tube and an outer peripheral portion of the first metal diaphragm sealed to the metal body, the first metal diaphragm selectively moving the metal tube between open and closed positions in response to force acting on the first metal diaphragm; and a second metal diaphragm sealingly secured to an outer periphery of the metal tube and sealed to the metal body at a location spaced from the first metal diaphragm so that the metal tube forms a leak tight passageway between and through the first and the second metal diaphragms; a second flow control component disposed in-line and including a second inlet and a second outlet that communicates with the inlet and outlet of the in-line flow control component; a second metal tube extending through at least a portion of the metal body that forms a continuation of the flow path, one end of the second metal tube selectively sealingly engaging a second metal valve seat for controlling fluid flow between the second inlet and the second outlet; and a third metal diaphragm having an opening so that an inner peripheral portion of the third metal diaphragm is sealingly secured to an outer periphery of the second metal tube and an outer peripheral portion is sealingly secured to the metal body, the third metal diaphragm selectively moving the second metal tube and the second seal member between open and closed positions in response to force acting on the third metal diaphragm.