Classifier readiness and maintenance in automatic defect classification

摘要

A method for classification includes receiving inspection data associated with a plurality of defects found in one or more samples and receiving one or more benchmark classification comprising a class for each of the plurality of defects. A readiness criterion for one or more of the classes is evaluated based on the one or more benchmark classification results, wherein the readiness criterion comprises for each class, a suitability of the inspection data for training an automatic defect classifier for the class. A portion of the inspection data is selected corresponding to one or more defects associated with one or more classes that satisfy the readiness criterion. One or more automatic classifiers are trained for the one or more classes that satisfy the readiness criterion using the selected portion of the inspection data.

主权项

1. A method for classification, comprising:
receiving, by a computer system, inspection data associated with a plurality of defects found in one or more samples; receiving, by the computer system, one or more benchmark classification results comprising a class for each of the plurality of defects; evaluating, by the computer system, a readiness criterion for one or more of the classes based on the one or more benchmark classification results, wherein the readiness criterion for a given class is indicative of a suitability of the inspection data for training an automatic defect classifier for the given class, wherein the suitability of the inspection data for training the automatic defect classifier for the given class is indicated when the readiness criterion is satisfied, wherein the readiness criterion for the given class is satisfied when: an entire number of defects that have been classified in the benchmark classification results into borders of the given class is above a threshold number, and a ratio of a number of defects that have been classified into the borders of the given class with no overlapping with a classification associated with borders from another class to the entire number of defects that have been classified into the borders of the given class matches a predefined criterion; selecting a portion of the inspection data corresponding to one or more defects associated with one or more classes that satisfy the readiness criterion; and training one or more automatic classifiers for the one or more classes that satisfy the readiness criterion using the selected portion of the inspection data.