发明名称 |
Method for fabrication of copper-indium gallium oxide and chalcogenide thin films |
摘要 |
A composition of matter and method of forming copper indium gallium sulfide (CIGS), copper indium gallium selenide (CIGSe), or copper indium gallium telluride thin film via conversion of layer-by-layer (LbL) assembled Cu—In—Ga oxide (CIGO) nanoparticles and polyelectrolytes. CIGO nanoparticles are created via a flame-spray pyrolysis method using metal nitrate precursors, subsequently coated with polyallylamine (PAH), and dispersed in aqueous solution. Multilayer films are assembled by alternately dipping a substrate into a solution of either polydopamine (PDA) or polystyrenesulfonate (PSS) and then in the CIGO-PAH dispersion to fabricate films as thick as 1-2 microns. After LbL deposition, films are oxidized to remove polymer and sulfurized, selenized, or tellurinized to convert CIGO to CIGS, CIGSe, or copper indium gallium telluride. |
申请公布号 |
US9608146(B2) |
申请公布日期 |
2017.03.28 |
申请号 |
US201514682574 |
申请日期 |
2015.04.09 |
申请人 |
The United States of America, as represented by the Secretary of the Navy |
发明人 |
Dressick Walter J.;Sanghera Jasbinder S.;Kim Woohong;Baker Colin C.;Myers Jason D.;Frantz Jesse A. |
分类号 |
H01L31/032;H01L21/02 |
主分类号 |
H01L31/032 |
代理机构 |
US Naval Research Laboratory |
代理人 |
US Naval Research Laboratory ;Forman Rebecca L. |
主权项 |
1. A method of making copper indium gallium chalcogenide thin films, comprising:
producing copper-indium-gallium oxide (CIGO) nanoparticles via flame spray pyrolysis; binding the CIGO nanoparticles to a polyamine and dispersing the polyamine-CIGO nanoparticles in an aqueous solution to form a polyamine-CIGO dispersion; making a polyanion solution; and dipping a substrate into the polyanion solution and then the polyamine-CIGO dispersion, wherein alternate dipping between the polyanion solution and the coated CIGO dispersion may be repeated multiple times to form a CIGO film. |
地址 |
Washington DC US |