Micromachined piezoelectric x-axis gyroscope

摘要

A method of fabricating a gyroscope may involve depositing conductive material on a substrate, forming an anchor on the substrate, forming a drive frame on the anchor and forming pairs of drive beams on opposing sides of the anchor. The drive beams may be configured to constrain the drive frame to rotate substantially in the plane of the drive beams. The method may involve forming a proof mass around the drive frame and forming a plurality of sense beams that connect the drive frame to the proof mass. The sense beams may be tapered sense beams having a width that decreases with increasing distance from the anchor. The tapered sense beams may be configured to allow sense motions of the proof mass in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation. Some components may be formed from plated metal.

主权项

1. A method of fabricating a gyroscope, the method comprising:
depositing conductive material on a substrate; forming an anchor on the substrate; forming a drive frame on the anchor; forming pairs of drive beams on opposing sides of the anchor, the drive beams connecting the drive frame to the anchor, the drive beams being configured to constrain the drive frame to rotate substantially in a plane of the drive beams; forming a proof mass around the drive frame; and forming a plurality of sense beams that connect the drive frame to the proof mass, the sense beams being tapered sense beams having a width that decreases with increasing distance from the anchor, the tapered sense beams being configured to allow sense motions of the proof mass in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation.