Imprinting device and imprinting method

摘要

An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.

主权项

1. An imprinting device that transfers a mold pattern on a die to a molding target, the imprinting device comprising:
a casing forming a pressure-adjusting chamber; a stage supporting the die and the molding target; a frame encircling an outer circumference of the stage; first moving means that moves the casing and the stage in a direction coming close to each other or becoming distant from each other; second moving means that moves the casing and the frame in a direction coming close to each other or becoming distant from each other; pressure-adjusting means that adjusts pressure of a fluid in the pressure-adjusting chamber; and decompression means which decompresses a decompression chamber formed by the frame and the die or the molding target, and which eliminates the fluid present between the die and the molding target.