Method for forming a mask pattern using a laser

摘要

A method of forming a pattern on a mask sheet using a laser beam includes determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet, determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet, applying a counter force to the mask sheet, fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet, scanning the laser beam along the correction scan line, and releasing the counter force which is applied to the mask sheet.

主权项

1. A method of forming a pattern on a mask sheet using a laser beam, the method comprising:
determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet; determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet; applying a counter force to the mask sheet; fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet; scanning the laser beam along the correction scan line; and releasing the counter force which is applied to the mask sheet; the determining the correction scan line of the laser beam includes: applying a counter force to a preparatory mask sheet; fixing the preparatory mask sheet to a preparatory mask frame while the counter force is applied to the preparatory mask sheet; scanning the laser beam along the target scan line; releasing the counter force which is applied to the preparatory mask sheet; determining an actual scan line of the laser, in a status when the counter force which is applied to the preparatory mask sheet is released; determining an error between the target scan line and the actual scan line of the laser beam; and setting the correction scan line of the laser beam using the error.