发明名称 Memory device and method of fabricating the same
摘要 A memory device including a substrate, an insulating layer on the substrate, the insulating layer including a first region having a first top surface and a second region having a second top surface, the second top surface being lower than the first top surface with respect to the substrate, the first region including a first through hole penetrating therethrough, the second region including a second through hole penetrating therethrough, a first conductive pattern filling the first through hole, a second conductive pattern at least partially filling the second through hole, a magnetic tunnel junction pattern on the first conductive pattern, and a contact plug coupled to the second conductive pattern may be provided. Further, a method of fabricating the memory device also may be provided.
申请公布号 US9608040(B2) 申请公布日期 2017.03.28
申请号 US201615158981 申请日期 2016.05.19
申请人 Samsung Electronics Co., Ltd. 发明人 Baek Gwang-Hyun;Kim Inho;Kim Jong-Kyu;Park Jongchul;Oh Jung-Ik
分类号 H01L43/12;H01L27/22;H01L43/02;H01L43/08;H01L43/10;G11C11/16;H01L23/528 主分类号 H01L43/12
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A memory device, comprising: a substrate; an insulating layer on the substrate, the insulating layer including a first region having a first top surface and a second region having a second top surface, the second top surface being lower than the first top surface with respect to the substrate, the first region including a first through hole penetrating therethrough, the second region including a second through hole penetrating therethrough; a first conductive pattern filling the first through hole; a second conductive pattern at least partially filling the second through hole; a magnetic tunnel junction pattern on the first conductive pattern; and a contact plug coupled to the second conductive pattern.
地址 Gyeonggi-do KR