Microfabricated optical apparatus

摘要

A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via.

主权项

1. A method for fabricating an optical apparatus on a substrate, comprising:
forming a device cavity in a lid wafer; forming a through silicon via through the substrate; disposing a light source driven by a waveform which generates optical radiation on the substrate, and coupling the light source electrically to the through silicon via; disposing a beam shaping element on the substrate; disposing a turning surface which redirects the beam of light; bonding the substrate to the lid wafer to encapsulate the optical apparatus in a substantially hermetic device cavity, wherein forming the through silicon via comprises: etching a blind trench into a front side of the substrate leaving residual substrate material; coating the trench with an insulating material; depositing a conductive material in the blind trench; and removing the residual substrate material from a backside of the substrate to form the via.