Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

摘要

A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.

主权项

1. An electromagnetic device comprising:
a core having a width and a length along a longitudinal axis, the core defining a cavity along the longitudinal axis, and including:
a first magnetic layer,a second magnetic layer positioned substantially parallel to the first magnetic layer, andan electrically insulating layer positioned between the first magnetic layer and the second magnetic layer for suppressing a current flowing between the first magnetic layer and the second magnetic layer, each of the first magnetic layer and the second magnetic layer formed as a single and continuous segment for providing a continuous closed-loop magnetic flux free of flux bunching and spreading; a semiconductor substrate positioned at least partially in the cavity and having a plurality of openings; and a coil made of an electrically conductive material and positioned or embedded in the plurality of openings of the semiconductor substrate, the coil having a portion that is substantially parallel to the longitudinal axis.