Handler apparatus that conveys a device under test to a test socket and test apparatus that comprises the handler apparatus

摘要

Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket fitting unit which the test socket fits, prior to fitting of a device holder holding the device under test to the test socket; a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the test socket in a state in which the socket fitting unit fits the test socket; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit; and a conveyer that conveys the device holder in which the position of the device under test has been adjusted, to fit the test socket.

主权项

1. A handler apparatus that conveys a device under test to a first test socket from among a plurality of test sockets, comprising:
a socket fitting unit to which the first test socket is removably fit prior to a device holder holding the device under test being fit to the first test socket; a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the first test socket in a state in which the first test socket is fit to the socket fitting unit; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit; a conveyer that conveys the device holder, in which the position of the device under test has been adjusted, to the first test socket such that the device holder is fit to the first test socket in a state in which the first test socket is removed from the socket fitting unit; and a tray for adjustment on which the socket fitting unit is mounted, wherein the conveyer conveys the tray for adjustment so as to sequentially fit the plurality of test sockets to the socket fitting unit.