Low power, temperature regulated circuit for precision integrated circuits

摘要

Various embodiments provide a temperature regulated circuit. The temperature regulated circuit includes a suspended mass that is positioned in an opening of a frame. The suspended mass is suspended from the frame by a plurality of support beams that may be made of thermally insulating material. The suspended mass provides a thermally isolated substrate for an integrated circuit. The suspended mass also includes a temperature sensor configured to measure a temperature of the integrated circuit, and a heater configured to heat the integrated circuit. A controller is positioned on the frame and is configured to receive temperature measurements from the temperature sensor and control the heater based on the temperature measurements.

主权项

1. A device, comprising:
a frame having an opening; a controller on the frame; a plurality of support beams made of thermally insulating material; a suspended mass positioned in the opening of the frame, the suspended mass being coupled to the frame by the plurality of support beams; an integrated circuit, a temperature sensor, and a heater on the suspended mass; a first conductive track on a first support beam of the plurality of support beams, the first conductive track electrically coupled to the integrated circuit, the temperature sensor, or the heater.