Method for depositing electrically insulating layers

摘要

The invention relates to a method for operating an arc source, whereby an electric spark discharge is ignited and run on the surface of a target and the spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a pulsed current generated by a periodically applied voltage signal. The voltage at the arc source is boosted over several microseconds and the shape of the voltage signal is in essence arbitrarily selectable.

主权项

1. Method for operating an arc source, whereby an electric spark discharge is ignited and run on a surface of a target (5) to evaporate the target (5) to deposit onto a substrate, and the electric spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a periodically applied pulsed current, characterized in that
a pulsed voltage signal (21) is generated by a pulsed voltage source delivering a desired shape of the pulsed voltage signal, the pulsed current results from the pulsed voltage signal (21) and the pulsed voltage signal (21) is generated with a pulse length (Tp) of at least two microseconds, wherein the pulsed voltage signal and pulsed current each have ascending slopes, wherein the pulsed current reaches a pulsed current maximum after the pulsed voltage signal reaches a pulsed voltage maximum, and wherein the pulsed voltage signal remains constant at the used voltage maximum until the used current reaches the pulsed current maximum.