Laser machining systems and methods with vision correction and/or tracking

摘要

Vision correction and tracking systems may be used in laser machining systems and methods to improve the accuracy of the machining. The laser machining systems and methods may be used to scribe one or more lines in large flat workpieces such as solar panels. In particular, laser machining systems and methods may be used to scribe lines in thin film photovoltaic (PV) solar panels with accuracy, high speed and reduced cost. The vision correction and/or tracking systems may be used to provide scribe line alignment and uniformity based on detected parameters of the scribe lines and/or changes in the workpiece.

主权项

1. A laser machining system comprising:
a part handling system including a workpiece support surface for supporting a workpiece to be machined; at least one stationary laser source for generating at least one laser beam; at least one laser scanning stage positioned relative to the part handling system for linear movement along a scanning axis, wherein the stationary laser source is not located on the laser scanning stage and the laser scanning stage moves relative to the stationary laser source; a movable optical head located on the laser scanning stage and movable with the laser scanning stage relative to the stationary laser source, the movable optical head including a beam delivery system for receiving the at least one laser beam, for modifying the at least one laser beam, and for directing the modified beam at the workpiece while moving to machine the workpiece; and a workpiece tracking system for tracking changes in the workpiece relative to the movable optical head and for adjusting at least one parameter of the modified beam in response to the changes in the workpiece, wherein the workpiece tracking system comprises first and second sensors for sensing a process plane or a surface of the workpiece to track changes in a relative height of the workpiece relative to the movable optical head, wherein the first and second sensors are located on each side of a location where the modified beam is directed from the movable optical head.