| 发明名称 |
PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOBILE BODY |
| 摘要 |
A physical quantity sensor includes a base substrate, a movable unit which is disposed so as to be displaced with respect to the base substrate, a detecting electrode which is provided on the movable unit side of the base substrate, and is disposed so as to face the movable unit, and a conductive film which is provided on the base substrate side of the movable unit, and is disposed so as to face the detecting electrode, in which a difference in work function between the detecting electrode and the conductive film is 0.4 eV or less. |
| 申请公布号 |
US2017082653(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615264866 |
申请日期 |
2016.09.14 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
KOMIZO Koichiro |
| 分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A physical quantity sensor comprising:
a substrate; a movable unit which is disposed so as to be displaced with respect to the substrate; an electrode which is provided on the movable unit side of the substrate, and is disposed so as to face the movable unit; and a conductive unit which is provided on the substrate side of the movable unit, and is disposed so as to face the electrode, wherein a difference in work function between the electrode and the conductive unit is 0.4 eV or less. |
| 地址 |
Tokyo JP |
