TEST SYSTEMS AND METHODS FOR CHIPS IN WAFER SCALE PHOTONIC SYSTEMS

摘要

A qualification apparatus for a photonic chip on a wafer that leaves undisturbed an edge coupler that provides an operating port for the photonic devices or circuits on the chip during normal operation in order to not introduce extra loss in the optical path of the final circuit. The qualification apparatus provides an optical path that is angled with regard to the surface of the chip, for example by using a grating coupler. The qualification apparatus can be removed after the chip is qualified. Optionally, the qualification apparatus can be left in communication with the chip and optionally employed as an input port for the chip after the chip has been separated from other chips on a common substrate.

主权项

1. A qualification apparatus for a photonic chip on a substrate, comprising:
a wafer having constructed thereon at least one photonic chip, said photonic chip comprising a circuit having an operating port configured to be used during normal operation of said photonic chip, said photonic chip configured to be separated from other photonic chips on said wafer; said wafer having constructed thereon a test port comprising a grating coupler in optical communication with said circuit, said grating coupler configured to interact with optical radiation that propagates at an angle to a free surface of said wafer, said grating coupler configured to be used during a qualification test of said photonic chip which is conducted prior to said photonic chip being separated from other photonic chips on said wafer.