发明名称 STRIPPING APPARATUS AND DISPLAY SUBSTRATE PRODUCTION LINE
摘要 A stripping apparatus and a display substrate production line. The stripping apparatus comprises a stripping chamber (1) and a liquid stripper in the stripping chamber (1) for providing a set temperature. The stripping apparatus further comprises a liquid-jet cutter mechanism (2) which comprises a liquid supply conduit (21) and a liquid-jet cutting head (22); the liquid supply conduit (21) is used to supply a cleaning fluid to the liquid-jet cutting head (22), the liquid-jet cutting head (22) is used to output the cleaning fluid, the liquid supply conduit (21) is disposed in the stripping chamber (1), and the liquid stripper is able to make the cleaning fluid in the liquid supply conduit (21) reach the set temperature. The stripping apparatus enables the cleaning fluid to reach a set temperature, thereby effectively removing the liquid stripper and photoresist left on a display substrate, preventing precipitation of the liquid stripper on the display substrate, and further preventing the liquid stripper from crystallizing and blocking the outlet of the liquid-jet cutting head (22). In addition, the original thermal energy in the stripping chamber (1) can be effectively used, thereby conserving energy.
申请公布号 WO2017045363(A1) 申请公布日期 2017.03.23
申请号 WO2016CN74099 申请日期 2016.02.19
申请人 BOE TECHNOLOGY GROUP CO., LTD.;HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 ZHANG, Fan;HU, Wei;CHEN, Xianhao;LIU, Jianzhao;WANG, Jianwei;LIU, Zuhong;OH, Daeoh
分类号 H01L21/67;B08B3/02;B08B3/10;G02F1/1333;G03F7/42;H01L21/02 主分类号 H01L21/67
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