发明名称 MASS SPECTROMETER
摘要 The present invention has: ion sources (1, 2); a mass spectrometry unit (11) disposed in a vacuum chamber (6); a first flow path (110) and a second flow path (101) that introduce ions produced by the ion sources to the mass spectrometry unit inside the vacuum chamber; and a blocking mechanism (30) for selectively blocking ions and neutral gas introduced to the mass spectrometry unit through the first flow path or ions and neutral gas introduced to the mass spectrometry unit through the second flow path. The distance (d2) between a flow path outlet (112) of the first flow path on the mass spectrometry unit side and a flow path outlet (113) of the second flow path on the mass spectrometry side is set to be shorter than the distance (d1) between a flow path inlet (110) of the first flow path on the ion source side and a flow path inlet (111) of the second flow path on the ion source side.
申请公布号 WO2017046849(A1) 申请公布日期 2017.03.23
申请号 WO2015JP76021 申请日期 2015.09.14
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 SUGIYAMA Masuyuki;SATAKE Hiroyuki;HASEGAWA Hideki;NISHIMURA Kazushige
分类号 H01J49/06;G01N27/62 主分类号 H01J49/06
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